Si 2p
| name | Si wafer | Si wafer | unit |
| orbit | Si 2p | Si 2p | |
| source | Ga Ka | Ga Ka | |
| source energy | 9251.74 | 9251.74 | eV |
| pass energy | 200 | 100 | eV |
| start energy (kinetic) | 9138 | 9144 | eV |
| end energy (kinetic) | 9154 | 9152 | eV |
| start energy (binding) | 110.04 | 104.04 | eV |
| end energy (binding) | 94.04 | 96.04 | eV |
| energy step | 0.1 | 0.05 | eV |
| dwell / point | 2 | 1 | sec |
| number of sweep | 10 | 41 | |
| mode | sweep | sweep | |
| total measurement time | 112.7 | 231 | min |
| entrance slit | 0.5 | 1.5 | mm |
| lens mode | transmission | transmission | |
| data points | 161 | 161 | |
| take off angle | 88 | 88 | deg |
| neutralize | |||
| comment |