wide
| name | Cu | Cu | unit |
| sample shape | sheet | sheet | |
| orbit | wide | wide | |
| source | Ga Ka | Al Ka | |
| source energy | 9251.74 | 1486 | eV |
| pass energy | 500 | 200 | |
| start energy (kinetic) | 4251.74 | 286 | eV |
| end energy (kinetic) | 9251.74 | 1486 | eV |
| start energy (binding) | 0 | 0 | eV |
| end energy (binding) | 5000 | 1200 | eV |
| energy step | 1 | 1 | eV |
| dwell / point | 0.3 | 0.3 | sec |
| number of sweep | 1 | 1 | sweep |
| mode | Swept | Swept | |
| total measurement time | 25.225 | 6.095 | min |
| entrance slit | 0.5 | 0.5 | mm |
| lens mode | Transmission | Transmission | |
| data points | 5001 | 1201 | |
| take off angle | 88 | 88 | |
| neutralize | |||
| comment |