Au 4f
| name | Au | Au | unit |
| sample shape | film | film | |
| orbit | Au 4f | Au 4f | |
| source | Ga Ka | Al Ka | |
| source energy | 9251.74 | 1486 | eV |
| pass energy | 200 | 200 | |
| start energy (kinetic) | 9157.24 | 1391.5 | eV |
| end energy (kinetic) | 9174.24 | 1408.5 | eV |
| start energy (binding) | 77.5 | 77.5 | eV |
| end energy (binding) | 94.5 | 94.5 | eV |
| energy step | 0.1 | 0.1 | eV |
| dwell / point | 0.2 | 0.2 | sec |
| number of sweep | 30 | 10 | sweep |
| mode | Swept | Swept | |
| total measurement time | 34.7 | 11.5667 | min |
| entrance slit | 0.5 | 0.5 | mm |
| lens mode | Transmission | Transmission | |
| data points | 171 | 171 | |
| take off angle | 88 | 88 | |
| neutralize | |||
| comment |